Microelectromechanical Resonant Accelerometer Designed with a High Sensitivity
نویسندگان
چکیده
منابع مشابه
Microelectromechanical Resonant Accelerometer Designed with a High Sensitivity
This paper describes the design and experimental evaluation of a silicon micro-machined resonant accelerometer (SMRA). This type of accelerometer works on the principle that a proof mass under acceleration applies force to two double-ended tuning fork (DETF) resonators, and the frequency output of two DETFs exhibits a differential shift. The dies of an SMRA are fabricated using silicon-on-insul...
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ژورنال
عنوان ژورنال: Sensors
سال: 2015
ISSN: 1424-8220
DOI: 10.3390/s151229803